ESD root-cause debug,
end to end.
Everything from the SV* failure-path read through to the bench grounding rules, in the order we worked it. Two damage channels — over-voltage and over-current — carry the whole story.
- The SV* ESD problem
- First principles — two damage channels
- Stress models & the pulse-width axis
- The clamp — AC trigger + snapback
- CDM vs HBM — diagnosis by duration
- Terminology
- The diagnostic flow
- Test configurations — pin grounding
- Zapping vs curve tracing
- SV* test plan & fixes
- References
Contents
1. The SV* ESD problem
The pin map shows the SVID signals split across two ESD domains, and the high-voltage outputs sit behind programmable isolation that can strand the discharge.
- Two-domain SVID. Low-voltage I/O —
SVC, SVDL, SVTI, SVTOL— lives in thePvdd2AnaVddio / prgCustomIo3group, clamped to PGND. The high-voltage outputs —SVDH, SVTOH— sit in the far-rightprgSvidio2VddioHDriveblock referenced to VDDIO. - The yellow failure path. A positive strike on
SVDHmust travel up into the VDDIO net, across to theprgVddioCDGclamp, then down to PGND. - The stranded path. Two programmable elements poison that route for ESD: the
prgVddioSwitch1 kΩ legs (≈2 kV drop at HBM peak when the bridge FET is off) and theprgGpioRfloatwell switch (debiases under a fast transient). If current can't reach the clamp, it crowds into the HDrive PMOS drain junction.
SVDH/SVTOH are exposed in both channels: a fast edge overshoots the far clamp onto the HDrive gate oxide (voltage), and a long event can't reach the clamp through the 1 kΩ/floatwell so it melts the drain (current). The rest of this document is the framework to prove which.
2. The two damage channels
Strip away the acronyms and silicon dies in exactly two ways. Which one wins depends on what is exceeded first — a critical field or a melting temperature.
| Channel | Governing law | What fails | Signature | Favoured by |
|---|---|---|---|---|
| Over-voltage field-driven | E = V/d > E_crit (≈6–10 MV/cm SiO₂) | Gate-oxide rupture, junction reverse breakdown, ILD puncture | Gate leakage; low-ohm G–D/G–S short | Fast edges — CDM, IEC first peak |
| Over-current thermal-driven | P = I²R → T > T_melt (Si 1414 °C, Al 660 °C) | 2nd breakdown / filamentation, metal & contact fuse, resistor burnout | Drain–source short; junction leakage; opens | Long / high-energy — HBM, MM, IEC tail |
E = V/d exceeds ≈6–10 MV/cm it ruptures into a conductive filament — the dominant CDM failure. Cross-section via Wikimedia Commons (see page for license).3. Stress models & the pulse-width axis
The model names (HBM, CDM…) are just points on a single axis: pulse width. Pulse width decides whether heat or field reaches its limit first.
| Model | Rise | Duration | Peak current | Tends to fail |
|---|---|---|---|---|
| HBM | I | |||
| MM | I | |||
| CDM | V | |||
| IEC | V/I |
Bars normalized per column; CDM peak current is order-of-magnitude (package dependent). The orthogonality is the message: CDM = fast & brief (field), HBM = slow & long (thermal), IEC = fast edge and long tail (both).[6][7]
3.1 The Wunsch–Bell crossover
Thermal power-to-failure climbs steeply as pulses shorten (∝1/√τ in the diffusion regime), while the dielectric limit barely moves with time. The device fails at whichever limit is lower — so there is a crossover.[1]
So "longer duration" damages by current. More ∫I²R dt into the same spot → junction melt, metal/contact fuse, resistor burnout — all thermal.
4. The clamp — AC trigger + snapback
The cells repeated across the pin map (IS_AVNWELL, PVDD2POC, prgVddioCDG…) are all the same: an RC-triggered active MOSFET rail clamp.[5] It turns on two ways.
| Mechanism | Trigger | Behaviour | Risk |
|---|---|---|---|
| AC trigger primary | Displacement current in the RC net — responds to dV/dt, not a fixed voltage | Turns the big FET on in ~ns; holds for the RC time-out (hundreds of ns), clamping in triode at low V | If RC/gate drive is slower than the edge (CDM) → overshoot before conduction |
| Snapback backstop | Drain-junction avalanche fires the parasitic NPN (current-triggered) | Higher Vt1, then low holding voltage; carries large current | Non-uniform → filamentation if un-ballasted; Vt1 can exceed oxide BV in scaled nodes |
4.1 Two phases = two channels
A clamp event has a turn-on/overshoot phase and a conduction phase, and each owns one damage channel.
It2 (an over-current kill).5. CDM vs HBM — diagnosis by duration
Three physical claims from the session, each checked against published sources. All three hold.
| Claim | Verdict | Why (sourced) |
|---|---|---|
HBM (longer) → more current/thermal damage; energy ∫I²R dt accumulates, melts metal/junction | Correct | Wunsch–Bell: in the diffusion regime power-to-fail falls as 1/√τ, so longer pulses melt at lower current; HBM (130–170 ns) fails by junction melt & metal fuse.[1][3] |
| CDM (short, <1 ns) → voltage stress; edge outruns the RC clamp | Correct | CDM rise <200 ps; documented oxide damage from the ~20 ps initial step before the clamp conducts; oxide rupture is the dominant CDM failure mode.[8][9] |
| The first-order clamp sees higher voltage during CDM | Correct | An HBM-tuned clamp "may not even turn on before a CDM strike"; residual V = Vhold + I·Ron + L·di/dt, and L·di/dt + capacitive coupling overshoot onto internal gates.[6][10] |
6. Terminology
| Term | Spelled out | What it is | Example |
|---|---|---|---|
| TLP | Transmission Line Pulse | Lab generator making a rectangular ESD-like pulse, defined rise/width; standard ≈100 ns | 100 ns-TLP @ 3 V |
| vf-TLP | Very Fast TLP | Ultra-short TLP, ≤10 ns width, <1 ns rise; emulates CDM / IEC first peak | 1 ns-TLP, 5 ns-TLP |
| Zap | (bench slang) | One pulse event applied to the DUT — not a formal term but universal | "zapped it at 2 kV HBM" |
| Curve trace | DC I–V measurement | Force voltage, measure steady current (SMU / curve tracer). DC, not pulsed. Finds leakage, shorts, opens | sweep 0→3.3 V, read leakage |
| Snapback | 2nd breakdown region | On a pulsed I–V, current jumps as voltage drops (parasitic NPN on). Invisible to DC curve trace | Vt1=5.8 V → Vhold=2.1 V |
| It2 / Vt2 | 2nd-breakdown current/voltage | The TLP point where the device fails (thermal limit) | It2 = 8 A @ 100 ns |
| Vt1 / Vhold | Trigger / holding voltage | Where snapback starts, and the low plateau it holds | Vt1=5.8, Vhold=2.1 |
| Rdyn | Dynamic resistance | Slope of the snapback region, (Vt2−Vt1)/(It2−It1); lower = better clamp | ≈0.35 Ω |
7. The diagnostic flow
Each step measures something that tells you what to measure next.
Pre-stress curve trace (baseline)
DC leakage on the suspect pin and its neighbours, recorded in the same grounding you'll zap in (Ch 8–9). This is your "before" signature.
▼Read the failure signature
Gate leakage / low-ohm gate short → voltage. Drain–source short / junction leakage → current. Open on a bus → metal fuse.
▼TLP (100 ns) — measure It2
If current is suspected: sweep to failure, capture Vt1, Vhold, It2, Rdyn. That's the thermal limit in conduction.
▼vf-TLP (1–5 ns) — measure overshoot
If voltage is suspected: does the node overshoot oxide BV before the clamp turns on? Did snapback trigger?
▼Pulse-width sweep (1 / 10 / 30 / 100 / 300 ns)
The decisive test. If It2 falls steeply with width → thermal/current. If failure stays oxide regardless of width → field/voltage. Builds your own Wunsch–Bell curve.
▼CDM vs HBM on an identical pair (validate)
One part CDM, one part HBM. Different signatures → duration is the variable. Same signature → the path/clamp is the limit.
▼Failure analysis + fix
EMMI / OBIRCH / FIB to pinpoint the filament, then fix the owning phase (faster clamp for voltage, lower-R path / bigger FET for current) and re-qualify.
7.1 How OBIRCH builds its map
OBIRCH (Optical Beam Induced Resistance Change) localizes resistive defects one pixel at a time. A constant voltage holds the net biased; an IR laser (≈1.3 µm, so it works through the silicon backside) is raster-scanned, and at each beam position the laser locally warms the metal. Metal resistance rises with temperature, so under fixed V the supply current shifts by ΔI/I = −ΔR/R. The tool samples that supply current at every pixel and converts it to a resistance-change image.[15] So yes — the map is the supply current measured under constant voltage.
I is sampled per pixel. Normal metal gives a smooth background; a resistive defect gives an outsized ΔI spike. Baseline current is rejected continuously by laser modulation + lock-in.[14] Original schematic.Right: constant V, measure supply current, defect = outlier. Refine: it's one raster scan with the no-laser baseline rejected continuously by laser-modulation + lock-in — not two full laser-off / laser-on images subtracted (that's golden-device differencing, a separate method). And the contrast is an anomalous resistance change — high local R, current crowding, or a void that impedes heat spread — not "trapped heat" alone.[15][16]
Concretely, picture the classic V — ammeter — R loop. The chip net is the resistor; constant V holds it biased; the ammeter is the detector. The laser sets where on the die you are (the pixel's x,y); the ammeter reading at that instant is the pixel's value. Raster the beam and the readings fill the 2D map.
8. Test configurations — pin grounding
During a zap, only the pin under test is driven; the rest are either tied to ground or left floating. The default per ANSI/ESD STM5.5.1 and the JS-001 user guide is all other pins grounded — the worst case.[11][12]
| Rank | Configuration | Pin under test | Other I/O | Supply | When used |
|---|---|---|---|---|---|
| 1 · most common | Pad-to-ground | → source | grounded | grounded | Default qualification (HBM/CDM/IEC/TLP); worst-case coupling |
| 2 · common | Vdd-to-Vss (rail) | Vdd → source | floating | — | Power-rail clamp sizing; isolates the clamp |
| 3 · situational | Pad-to-supply | → source | floating / grounded | floating | Pad referenced to a Vdd domain |
| 4 · niche | Pin-pair / differential | A + B → source | grounded / float | grounded/float | Coupled diff pairs (LVDS/CML); cross-coupling failures |
9. Zapping vs curve tracing — same grounding?
The standards mandate grounding for the zap; DC curve tracing has no mandated scheme. Best practice is to match them so the before/after leakage comparison is apples-to-apples — coupling and parasitics are configuration-dependent.[13]
| Aspect | TLP / ESD zapping | DC I–V curve tracing |
|---|---|---|
| Pin under test | → TLP source (rectangular pulse, 0→V) | → SMU high (DC sweep 0→V_op) |
| Other I/O pins | Grounded (Config 1, worst case) | Grounded — match the zap |
| Supply (VDDIO) | Grounded | Grounded (match) |
| Ground / PGND | Reference (0 V) | SMU low / reference (same node) |
| Drive | Pulse: ns–µs, high current (A) | DC steady-state, low current (pA–µA) |
| Sensing | V & I probes on scope (transient) | Kelvin / 4-wire (removes lead R) |
| Yields | Vt1, Vhold, It2, Rdyn (snapback I–V) | Leakage, shorts/opens, parametric shift |
| Standard | ANSI/ESD STM5.5.1; JS-001 (HBM) | JESD25 / JESD89 — no mandated scheme; match ESD for correlation |
| Role in flow | Stress to failure; get the failure level | Baseline before & signature after |
Curve-trace with the identical grounding you zap in. Then a jump like 50 pA → 100 µA on the same pin is unambiguous damage, not a coupling artifact.
10. SV* test plan & fixes
| Result | Channel | Root cause | Fix |
|---|---|---|---|
| Fails vf-TLP (5 ns) but survives 100 ns-TLP | V | Turn-on overshoot onto HDrive gate oxide | Faster trigger (smaller RC, cap multiplier), lower Vt1, dual CDM diodes + secondary clamp at the pad |
| Fails 100 ns-TLP & HBM; survives vf-TLP | I | It2 too low / path strangled | Take the 1 kΩ (prgVddioSwitch) & floatwell out of the ESD path; widen bus/vias; enlarge MBIG; ballast |
| Fails both at similar current | V/I | Stranded clamp — no good route exists | Diff vs a clean pin; if reference passes → extract route R/L; add pad-local dual diode that bypasses the isolation |
Curve-trace baseline (Ch 9 grounding) → vf-TLP + 100 ns-TLP both polarities, SVDH→PGND and →VDDIO → pulse-width sweep if ambiguous → diff against a clean VDDIO pin → EMMI/OBIRCH the filament → fix the owning phase.
11. References
- Wunsch & Bell, "Threshold Failure Levels of Semiconductor Diodes and Transistors Due to Pulse Voltages," IEEE Trans. Nucl. Sci. NS-15, 1968 — power-to-failure vs pulse width. Wunsch–Bell curve figure
- "ESD protection design for I/O libraries in advanced CMOS," Solid-State Electronics — fundamental mechanisms; 6–10 MV/cm; 30× melt-resistance drop. sciencedirect S0038110108001664
- "HMM–TLP correlation for system-efficient ESD design," Microelectronics Reliability — 100 ns TLP ↔ thermal; oxide is a separate non-thermal channel. sciencedirect S0026271411005117
- "Identifying EOS and ESD Failures in Semiconductor Devices," Electronic Design — oxide rupture & filament imagery. electronicdesign.com 21799782
- "A MOSFET power-supply clamp with feedback-enhanced triggering," Microelectronics Reliability — RC-triggered active clamp operation. sciencedirect S0026271404001520
- onsemi — HBM vs IEC 61000-4-2: 8 kV HBM part can fail at 2 kV IEC; clamp may not turn on before a <1 ns edge. onsemi.com
- TI AAJ "Protecting your IC from system-level ESD" (SLYT492) — HBM/CDM/IEC waveform & peak-current comparison. ti.com/lit/an/slyt492
- "CDM ESD failure modes and VFTLP testing," EOS/ESD — gate-oxide damage is the dominant CDM failure. esda.org
- "Device Failure from the Initial Current Step of a CDM Discharge," In Compliance / EOS-ESD — ~6 V extra drop damages oxide at ~20 ps. incompliancemag.com
- "Challenges of CDM Modeling for High-Speed Interface Devices," In Compliance — reflections & voltage overshoots degrade CDM robustness. incompliancemag.com
- ANSI/ESD STM5.5.1 (TLP) & SP5.5.2 (vf-TLP), Component Level — non-tested pins to a common ground unless otherwise specified. esda.org standards
- ANSI/ESDA/JEDEC JS-001 (HBM) & JTR001 user guide — other pins shorted together and to ground (worst case). jedec.org
- Curve tracing & failure analysis best practice — match curve-trace grounding to the ESD test for correlation (Semitracks / RTI). semitracks.com
- K. Nikawa, "Optical Beam Induced Resistance Change (OBIRCH): overview and recent results," IEEE / EOS-ESD — 1.3 µm IR works through Si backside; laser-modulation + lock-in for high resolution. globalsino.com/EM/page2852
- "Dynamic resistance variation mapping technique for defect isolation," Microelectronics Reliability — conventional OBIRCH uses constant-voltage bias and current detection; PMU samples supply current per pixel as the laser rasters; resistance image computed from constant V. sciencedirect S0026271421000354
- iST — Optical Beam Induced Resistance Change (OBIRCH) service overview: temperature gradient → resistance variance; locates metal voids, voids under vias, high-R via bottoms, shorts/leaks. istgroup.com/en/service/obirch